TY - JOUR
T1 - Al-doped zinc oxide film deposition in function of power by ac bipolar pulse in reactive magnetron sputtering
AU - García-García, J.
AU - Pacheco-Sotelo, J.
AU - Valdivia-Barrientos, R.
AU - Rivera-Rodríguez, C.
AU - Pacheco-Pacheco, M.
AU - Gonzalez, Jean Jacques
AU - Soria-Arguello, G.
AU - Nieto-Pérez, M.
N1 - Funding Information:
Manuscript received December 1, 2010; revised June 1, 2011; accepted June 16, 2011. Date of publication August 4, 2011; date of current version November 9, 2011. This work was supported by Consejo Nacional de Ciencia y Tecnología, Consejo Mexiquense de Ciencia y Tecnología and ECOS-ANUIES program.
PY - 2011/11
Y1 - 2011/11
N2 - A reactive magnetron sputtering reactor powered by an ac bipolar pulse power source was used to grow aluminum-doped zinc oxide (ZnO:Al or AZO) on polypropylene films. The ac bipolar pulses and the electrode configuration assure a stable and arc-free material deposition at room temperature. The films were obtained in a reactive atmosphere of argon and oxygen at 1-Pa pressure and power ranges from 20 to 36 W. The surface of the AZO film was characterized using scanning electron microscopy.
AB - A reactive magnetron sputtering reactor powered by an ac bipolar pulse power source was used to grow aluminum-doped zinc oxide (ZnO:Al or AZO) on polypropylene films. The ac bipolar pulses and the electrode configuration assure a stable and arc-free material deposition at room temperature. The films were obtained in a reactive atmosphere of argon and oxygen at 1-Pa pressure and power ranges from 20 to 36 W. The surface of the AZO film was characterized using scanning electron microscopy.
KW - Plasma materials processing
KW - sputtering
UR - http://www.scopus.com/inward/record.url?scp=81255127491&partnerID=8YFLogxK
U2 - 10.1109/TPS.2011.2160368
DO - 10.1109/TPS.2011.2160368
M3 - Artículo
AN - SCOPUS:81255127491
SN - 0093-3813
VL - 39
SP - 2484
EP - 2485
JO - IEEE Transactions on Plasma Science
JF - IEEE Transactions on Plasma Science
IS - 11 PART 1
M1 - 5975248
ER -