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Validation of a CMOS-MEMS accelerometer based on FGMOS transduction by electromechanical modification of its coupling coefficient
G. S. Abarca-Jiménez, J. Mares-Carreño, M. A. Reyes-Barranca, B. Granados-Rojas, S. Mendoza-Acevedo, J. E. Munguía-Cervantes, M. A. Alemán-Arce
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations