Abstract
A microRaman probe and a scanning electron microscope with energy dispersive spectroscopy system were used to analyze spark-processed porous GaAs samples prepared by high voltage discharges at low repetition rates in different ambients. The resulting material was found to be amorphous material, with amorphous-GaAs, for samples prepared in pure nitrogen. The cubic phases of As2O3 were substituted by the monoclinic phase of As2O3 'claudetite' for samples prepared under a low concentration of oxygen.
Original language | American English |
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Pages | 622-627 |
Number of pages | 6 |
DOIs | |
State | Published - 1 May 2001 |
Externally published | Yes |
Event | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures - Duration: 1 May 2001 → … |
Conference
Conference | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
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Period | 1/05/01 → … |