Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia; Mario Alfredo Reyes-Barranca; Griselda Stephany Abarca-Jimenez; Luis Sanchez-Marquez; Luis Martin Flores-Nava; Oliverio Arellano-Cardenas

doi:10.1109/ICEEE.2019.8884566

Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Sanchez-Marquez, Luis Martin Flores-Nava, Oliverio Arellano-Cardenas

Unidad Profesional Interdisciplinaria de Ingeniería, Campus Hidalgo (UPIIH)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.

Original language	English
Title of host publication	2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728148403
DOIs	https://doi.org/10.1109/ICEEE.2019.8884566
State	Published - Sep 2019
Event	16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019 - Mexico City, Mexico Duration: 11 Sep 2019 → 13 Sep 2019

Publication series

Name	2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019

Conference

Conference	16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
Country/Territory	Mexico
City	Mexico City
Period	11/09/19 → 13/09/19

Keywords

Electrostatic Actuation
Linear Micromotor
MEMS
Mechanical Structure

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10.1109/ICEEE.2019.8884566

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Lopez-Tapia, A., Reyes-Barranca, M. A., Stephany Abarca-Jimenez, G., Sanchez-Marquez, L., Flores-Nava, L. M., & Arellano-Cardenas, O. (2019). Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. In 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019 Article 8884566 (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICEEE.2019.8884566

Lopez-Tapia, Andrea ; Reyes-Barranca, Mario Alfredo ; Stephany Abarca-Jimenez, Griselda et al. / Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019. Institute of Electrical and Electronics Engineers Inc., 2019. (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019).

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title = "Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology",

abstract = "This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.",

keywords = "Electrostatic Actuation, Linear Micromotor, MEMS, Mechanical Structure",

author = "Andrea Lopez-Tapia and Reyes-Barranca, {Mario Alfredo} and {Stephany Abarca-Jimenez}, Griselda and Luis Sanchez-Marquez and Flores-Nava, {Luis Martin} and Oliverio Arellano-Cardenas",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019 ; Conference date: 11-09-2019 Through 13-09-2019",

year = "2019",

month = sep,

doi = "10.1109/ICEEE.2019.8884566",

language = "Ingl{\'e}s",

series = "2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019",

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booktitle = "2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019",

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Lopez-Tapia, A, Reyes-Barranca, MA, Stephany Abarca-Jimenez, G, Sanchez-Marquez, L, Flores-Nava, LM & Arellano-Cardenas, O 2019, Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. in 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019., 8884566, 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019, Institute of Electrical and Electronics Engineers Inc., 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019, Mexico City, Mexico, 11/09/19. https://doi.org/10.1109/ICEEE.2019.8884566

Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. / Lopez-Tapia, Andrea; Reyes-Barranca, Mario Alfredo; Stephany Abarca-Jimenez, Griselda et al.
2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8884566 (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Lopez-Tapia, Andrea

AU - Reyes-Barranca, Mario Alfredo

AU - Stephany Abarca-Jimenez, Griselda

AU - Sanchez-Marquez, Luis

AU - Flores-Nava, Luis Martin

AU - Arellano-Cardenas, Oliverio

PY - 2019/9

Y1 - 2019/9

N2 - This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.

AB - This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.

KW - Electrostatic Actuation

KW - Linear Micromotor

KW - MEMS

KW - Mechanical Structure

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BT - 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 11 September 2019 through 13 September 2019

ER -

Lopez-Tapia A, Reyes-Barranca MA, Stephany Abarca-Jimenez G, Sanchez-Marquez L, Flores-Nava LM, Arellano-Cardenas O. Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. In 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019. Institute of Electrical and Electronics Engineers Inc. 2019. 8884566. (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019). doi: 10.1109/ICEEE.2019.8884566

Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

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