Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia; Mario Alfredo Reyes-Barranca; Griselda Stephany Abarca-Jimenez; Luis Sanchez-Marquez; Luis Martin Flores-Nava; Oliverio Arellano-Cardenas

doi:10.1109/ICEEE.2019.8884566

Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Sanchez-Marquez, Luis Martin Flores-Nava, Oliverio Arellano-Cardenas

Unidad Profesional Interdisciplinaria de Ingeniería, Campus Hidalgo (UPIIH)

Producción científica: Capítulo del libro/informe/acta de congreso › Contribución a la conferencia › revisión exhaustiva

2 Citas (Scopus)

Resumen

This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.

Idioma original	Inglés
Título de la publicación alojada	2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
Editorial	Institute of Electrical and Electronics Engineers Inc.
ISBN (versión digital)	9781728148403
DOI	https://doi.org/10.1109/ICEEE.2019.8884566
Estado	Publicada - sep. 2019
Evento	16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019 - Mexico City, México Duración: 11 sep. 2019 → 13 sep. 2019

Serie de la publicación

Nombre	2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019

Conferencia

Conferencia	16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019
País/Territorio	México
Ciudad	Mexico City
Período	11/09/19 → 13/09/19

Acceder al documento

10.1109/ICEEE.2019.8884566

Otros archivos y enlaces

Enlace a la publicación en Scopus

Citar esto

Lopez-Tapia, A., Reyes-Barranca, M. A., Stephany Abarca-Jimenez, G., Sanchez-Marquez, L., Flores-Nava, L. M., & Arellano-Cardenas, O. (2019). Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. En 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019 Artículo 8884566 (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICEEE.2019.8884566

Lopez-Tapia, Andrea ; Reyes-Barranca, Mario Alfredo ; Stephany Abarca-Jimenez, Griselda et al. / Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019. Institute of Electrical and Electronics Engineers Inc., 2019. (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019).

@inproceedings{f4764c13a24a44da94ba419b552f126c,

title = "Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology",

abstract = "This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.",

keywords = "Electrostatic Actuation, Linear Micromotor, MEMS, Mechanical Structure",

author = "Andrea Lopez-Tapia and Reyes-Barranca, {Mario Alfredo} and {Stephany Abarca-Jimenez}, Griselda and Luis Sanchez-Marquez and Flores-Nava, {Luis Martin} and Oliverio Arellano-Cardenas",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019 ; Conference date: 11-09-2019 Through 13-09-2019",

year = "2019",

month = sep,

doi = "10.1109/ICEEE.2019.8884566",

language = "Ingl{\'e}s",

series = "2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019",

address = "Estados Unidos",

}

Lopez-Tapia, A, Reyes-Barranca, MA, Stephany Abarca-Jimenez, G, Sanchez-Marquez, L, Flores-Nava, LM & Arellano-Cardenas, O 2019, Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. En 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019., 8884566, 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019, Institute of Electrical and Electronics Engineers Inc., 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019, Mexico City, México, 11/09/19. https://doi.org/10.1109/ICEEE.2019.8884566

Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. / Lopez-Tapia, Andrea; Reyes-Barranca, Mario Alfredo; Stephany Abarca-Jimenez, Griselda et al.
2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019. Institute of Electrical and Electronics Engineers Inc., 2019. 8884566 (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019).

Producción científica: Capítulo del libro/informe/acta de congreso › Contribución a la conferencia › revisión exhaustiva

TY - GEN

T1 - Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

AU - Lopez-Tapia, Andrea

AU - Reyes-Barranca, Mario Alfredo

AU - Stephany Abarca-Jimenez, Griselda

AU - Sanchez-Marquez, Luis

AU - Flores-Nava, Luis Martin

AU - Arellano-Cardenas, Oliverio

PY - 2019/9

Y1 - 2019/9

N2 - This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.

AB - This paper shows the design of the mechanical structure of a linear electrostatic micromotor, consisting on four springs to which a moving set of electrodes (which will move due to the electrostatic actuation) is attached to, together with one of the plates for a position sensor of the system. This structure is designed in an aluminum layer under the rules of the standard CMOS technology. In addition, the mechanical structure model which is presented, eliminates the friction between it and the substrate. The simulations were obtained using COMSOL.

KW - Electrostatic Actuation

KW - Linear Micromotor

KW - MEMS

KW - Mechanical Structure

UR - http://www.scopus.com/inward/record.url?scp=85075102663&partnerID=8YFLogxK

U2 - 10.1109/ICEEE.2019.8884566

DO - 10.1109/ICEEE.2019.8884566

M3 - Contribución a la conferencia

AN - SCOPUS:85075102663

T3 - 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019

BT - 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019

Y2 - 11 September 2019 through 13 September 2019

ER -

Lopez-Tapia A, Reyes-Barranca MA, Stephany Abarca-Jimenez G, Sanchez-Marquez L, Flores-Nava LM, Arellano-Cardenas O. Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology. En 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019. Institute of Electrical and Electronics Engineers Inc. 2019. 8884566. (2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019). doi: 10.1109/ICEEE.2019.8884566

Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Resumen

Serie de la publicación

Conferencia

Acceder al documento

Otros archivos y enlaces

Huella

Citar esto