Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Sanchez-Marquez, Luis Martin Flores-Nava, Oliverio Arellano-Cardenas

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

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Engineering & Materials Science

Mathematics