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Composition of metal layers in CMOS-MEMS micromachining process
Benito Granados-Rojas, Mario Alfredo Reyes-Barranca, Luis Martin Flores-Nava, Griselda Stephany Abarca-Jimenez, Miguel Angel Aleman-Arce, Yesenia Eleonor Gonzalez-Navarro
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
Scopus
citations