Al-doped zinc oxide film deposition in function of power by ac bipolar pulse in reactive magnetron sputtering

J. García-García, J. Pacheco-Sotelo, R. Valdivia-Barrientos, C. Rivera-Rodríguez, M. Pacheco-Pacheco, Jean Jacques Gonzalez, G. Soria-Arguello, M. Nieto-Pérez

Research output: Contribution to journal › Article › peer-review