TY - JOUR
T1 - Thermal barrier coatings produced by chemical vapor deposition
AU - Vargas Garcia, J. R.
AU - Goto, Takashi
N1 - Funding Information:
This work was performed as a part of Nano-Coating Project sponsored by New Energy and Industrial Technology Development Organization (NEDO), Japan.
PY - 2003/7/1
Y1 - 2003/7/1
N2 - Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h-1 was also briefly introduced.
AB - Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h-1 was also briefly introduced.
KW - Chemical vapor deposition
KW - Columnar structure
KW - Deposition rate
KW - Laser CVD
KW - Plasma CVD
KW - Thermal barrier coating
KW - Yttria stabilized zirconia
UR - http://www.scopus.com/inward/record.url?scp=0242636469&partnerID=8YFLogxK
U2 - 10.1016/S1468-6996(03)00048-2
DO - 10.1016/S1468-6996(03)00048-2
M3 - Artículo de revisión
SN - 1468-6996
VL - 4
SP - 397
EP - 402
JO - Science and Technology of Advanced Materials
JF - Science and Technology of Advanced Materials
IS - 4
ER -