Thermal barrier coatings produced by chemical vapor deposition

J. R. Vargas Garcia; Takashi Goto

doi:10.1016/S1468-6996(03)00048-2

Thermal barrier coatings produced by chemical vapor deposition

J. R. Vargas Garcia, Takashi Goto

Research output: Contribution to journal › Review article › peer-review

77 Scopus citations

Abstract

Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h^-1 was also briefly introduced.

Original language	English
Pages (from-to)	397-402
Number of pages	6
Journal	Science and Technology of Advanced Materials
Volume	4
Issue number	4
DOIs	https://doi.org/10.1016/S1468-6996(03)00048-2
State	Published - 1 Jul 2003
Externally published	Yes

Keywords

Chemical vapor deposition
Columnar structure
Deposition rate
Laser CVD
Plasma CVD
Thermal barrier coating
Yttria stabilized zirconia

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10.1016/S1468-6996(03)00048-2

Cite this

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title = "Thermal barrier coatings produced by chemical vapor deposition",

abstract = "Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h-1 was also briefly introduced.",

keywords = "Chemical vapor deposition, Columnar structure, Deposition rate, Laser CVD, Plasma CVD, Thermal barrier coating, Yttria stabilized zirconia",

author = "{Vargas Garcia}, {J. R.} and Takashi Goto",

note = "Funding Information: This work was performed as a part of Nano-Coating Project sponsored by New Energy and Industrial Technology Development Organization (NEDO), Japan.",

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T1 - Thermal barrier coatings produced by chemical vapor deposition

AU - Vargas Garcia, J. R.

AU - Goto, Takashi

N1 - Funding Information: This work was performed as a part of Nano-Coating Project sponsored by New Energy and Industrial Technology Development Organization (NEDO), Japan.

PY - 2003/7/1

Y1 - 2003/7/1

N2 - Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h-1 was also briefly introduced.

AB - Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 μm h-1 was also briefly introduced.

KW - Chemical vapor deposition

KW - Columnar structure

KW - Deposition rate

KW - Laser CVD

KW - Plasma CVD

KW - Thermal barrier coating

KW - Yttria stabilized zirconia

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U2 - 10.1016/S1468-6996(03)00048-2

DO - 10.1016/S1468-6996(03)00048-2

M3 - Artículo de revisión

SN - 1468-6996

VL - 4

SP - 397

EP - 402

JO - Science and Technology of Advanced Materials

JF - Science and Technology of Advanced Materials

IS - 4

ER -

Thermal barrier coatings produced by chemical vapor deposition

Abstract

Keywords

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