Resumen
This paper presents results of porous SiC characterization using photoluminescence, Raman scattering and Atomic Force Microscopy. A comparative optical spectroscopy study on bulk SiC and porous SiC layers has shown a number of new features specific to nano-crystallite materials. The role of these effects on optical spectroscopy data in porous SiC accessed by photoluminescence and Raman scattering is discussed.
Título traducido de la contribución | Fotoluminiscencia y espectroscopia Raman en SiC poroso |
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Idioma original | Inglés |
Páginas (desde-hasta) | 536-538 |
Número de páginas | 3 |
Publicación | Microelectronics Journal |
Volumen | 36 |
N.º | 3-6 |
DOI | |
Estado | Publicada - mar. 2005 |