Abstract
This paper presents results of porous SiC characterization using photoluminescence, Raman scattering and Atomic Force Microscopy. A comparative optical spectroscopy study on bulk SiC and porous SiC layers has shown a number of new features specific to nano-crystallite materials. The role of these effects on optical spectroscopy data in porous SiC accessed by photoluminescence and Raman scattering is discussed.
Translated title of the contribution | Fotoluminiscencia y espectroscopia Raman en SiC poroso |
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Original language | English |
Pages (from-to) | 536-538 |
Number of pages | 3 |
Journal | Microelectronics Journal |
Volume | 36 |
Issue number | 3-6 |
DOIs | |
State | Published - Mar 2005 |
Keywords
- Exciton
- Phonon modes
- Photoluminescence
- Porous SiC
- Raman scattering