Resumen
The crystallization of amorphous carbon films, under inert atmospheres, occurs at annealing temperatures above 800 °C. In this work we have found that when the annealing of carbon films is performed under atmospheric conditions, crystallization occurs at temperatures as low as 200 °C. The catalytic effect of oxygen in the crystallization process is understood in terms of the generation of a porous structure in the carbon film due to the vaporization of carbon oxides.
Idioma original | Inglés |
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Páginas (desde-hasta) | 3015-3019 |
Número de páginas | 5 |
Publicación | Journal of Applied Physics |
Volumen | 78 |
N.º | 5 |
DOI | |
Estado | Publicada - 1995 |