Resumen
Analyses of Rutherford back scattered (RBS) 4He+-particle spectra of copper selenide thin films deposited on glass slides by chemical bath were carried out to determine the changes brought about in the thin film by annealing processes. The atomic density per unit area and composition of the films were obtained from these measurements. This analysis shows that annealing in a nitrogen atmosphere at 400°C leads to the conversion of CuxSe thin film to Cu2Se. Results of X-ray diffraction, optical, and electrical characteristics on the films are presented to supplement the RBS results.
Idioma original | Inglés |
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Páginas (desde-hasta) | 635-640 |
Número de páginas | 6 |
Publicación | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volumen | 161 |
DOI | |
Estado | Publicada - mar. 2000 |
Evento | The 14th International Conference on Ion Beam Analysis - 6th European Conference on Accelerators in Applied Research and Technology - Dresden, Ger Duración: 26 jul. 1999 → 30 jul. 1999 |