TY - JOUR
T1 - Ion beam analysis of copper selenide thin films prepared by chemical bath deposition
AU - Andrade, E.
AU - Garcia, V. M.
AU - Nair, P. K.
AU - Nair, M. T.S.
AU - Zavala, E. P.
AU - Huerta, L.
AU - Rocha, M. F.
PY - 2000/3
Y1 - 2000/3
N2 - Analyses of Rutherford back scattered (RBS) 4He+-particle spectra of copper selenide thin films deposited on glass slides by chemical bath were carried out to determine the changes brought about in the thin film by annealing processes. The atomic density per unit area and composition of the films were obtained from these measurements. This analysis shows that annealing in a nitrogen atmosphere at 400°C leads to the conversion of CuxSe thin film to Cu2Se. Results of X-ray diffraction, optical, and electrical characteristics on the films are presented to supplement the RBS results.
AB - Analyses of Rutherford back scattered (RBS) 4He+-particle spectra of copper selenide thin films deposited on glass slides by chemical bath were carried out to determine the changes brought about in the thin film by annealing processes. The atomic density per unit area and composition of the films were obtained from these measurements. This analysis shows that annealing in a nitrogen atmosphere at 400°C leads to the conversion of CuxSe thin film to Cu2Se. Results of X-ray diffraction, optical, and electrical characteristics on the films are presented to supplement the RBS results.
UR - http://www.scopus.com/inward/record.url?scp=0033889527&partnerID=8YFLogxK
U2 - 10.1016/S0168-583X(99)00994-5
DO - 10.1016/S0168-583X(99)00994-5
M3 - Artículo de la conferencia
SN - 0168-583X
VL - 161
SP - 635
EP - 640
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
T2 - The 14th International Conference on Ion Beam Analysis - 6th European Conference on Accelerators in Applied Research and Technology
Y2 - 26 July 1999 through 30 July 1999
ER -