Design of position sensor of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia; Mario Alfredo Reyes-Barranca; Griselda Stephany Abarca-Jimenez; Luis Sanchez-Marquez; Luis Martin Flores-Nava

doi:10.1109/CCE50788.2020.9299123

Design of position sensor of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Sanchez-Marquez, Luis Martin Flores-Nava

Unidad Profesional Interdisciplinaria de Ingeniería, Campus Hidalgo (UPIIH)

Producción científica: Capítulo del libro/informe/acta de congreso › Contribución a la conferencia › revisión exhaustiva

Resumen

This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.

Idioma original	Inglés
Título de la publicación alojada	2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
Editorial	Institute of Electrical and Electronics Engineers Inc.
ISBN (versión digital)	9781728189871
DOI	https://doi.org/10.1109/CCE50788.2020.9299123
Estado	Publicada - 11 nov. 2020
Evento	17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020 - Virtual, Mexico City, México Duración: 11 nov. 2020 → 13 nov. 2020

Serie de la publicación

Nombre	2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020

Conferencia

Conferencia	17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
País/Territorio	México
Ciudad	Virtual, Mexico City
Período	11/11/20 → 13/11/20

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10.1109/CCE50788.2020.9299123

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Lopez-Tapia, A., Reyes-Barranca, M. A., Stephany Abarca-Jimenez, G., Sanchez-Marquez, L., & Flores-Nava, L. M. (2020). Design of position sensor of a linear micromotor based on CMOS-MEMS technology. En 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020 Artículo 9299123 (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CCE50788.2020.9299123

Lopez-Tapia, Andrea ; Reyes-Barranca, Mario Alfredo ; Stephany Abarca-Jimenez, Griselda et al. / Design of position sensor of a linear micromotor based on CMOS-MEMS technology. 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020).

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title = "Design of position sensor of a linear micromotor based on CMOS-MEMS technology",

abstract = "This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.",

keywords = "FGMOS, Linear Electrostatic Micromotor, MEMS, Position Sensor",

author = "Andrea Lopez-Tapia and Reyes-Barranca, {Mario Alfredo} and {Stephany Abarca-Jimenez}, Griselda and Luis Sanchez-Marquez and Flores-Nava, {Luis Martin}",

note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020 ; Conference date: 11-11-2020 Through 13-11-2020",

year = "2020",

month = nov,

day = "11",

doi = "10.1109/CCE50788.2020.9299123",

language = "Ingl{\'e}s",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020",

address = "Estados Unidos",

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Lopez-Tapia, A, Reyes-Barranca, MA, Stephany Abarca-Jimenez, G, Sanchez-Marquez, L & Flores-Nava, LM 2020, Design of position sensor of a linear micromotor based on CMOS-MEMS technology. En 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020., 9299123, 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020, Institute of Electrical and Electronics Engineers Inc., 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020, Virtual, Mexico City, México, 11/11/20. https://doi.org/10.1109/CCE50788.2020.9299123

Design of position sensor of a linear micromotor based on CMOS-MEMS technology. / Lopez-Tapia, Andrea; Reyes-Barranca, Mario Alfredo; Stephany Abarca-Jimenez, Griselda et al.
2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9299123 (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020).

Producción científica: Capítulo del libro/informe/acta de congreso › Contribución a la conferencia › revisión exhaustiva

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AU - Lopez-Tapia, Andrea

AU - Reyes-Barranca, Mario Alfredo

AU - Stephany Abarca-Jimenez, Griselda

AU - Sanchez-Marquez, Luis

AU - Flores-Nava, Luis Martin

PY - 2020/11/11

Y1 - 2020/11/11

N2 - This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.

AB - This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.

KW - FGMOS

KW - Linear Electrostatic Micromotor

KW - MEMS

KW - Position Sensor

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Lopez-Tapia A, Reyes-Barranca MA, Stephany Abarca-Jimenez G, Sanchez-Marquez L, Flores-Nava LM. Design of position sensor of a linear micromotor based on CMOS-MEMS technology. En 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020. Institute of Electrical and Electronics Engineers Inc. 2020. 9299123. (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020). doi: 10.1109/CCE50788.2020.9299123

Design of position sensor of a linear micromotor based on CMOS-MEMS technology

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