Design of position sensor of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia; Mario Alfredo Reyes-Barranca; Griselda Stephany Abarca-Jimenez; Luis Sanchez-Marquez; Luis Martin Flores-Nava

doi:10.1109/CCE50788.2020.9299123

Design of position sensor of a linear micromotor based on CMOS-MEMS technology

Andrea Lopez-Tapia, Mario Alfredo Reyes-Barranca, Griselda Stephany Abarca-Jimenez, Luis Sanchez-Marquez, Luis Martin Flores-Nava

Unidad Profesional Interdisciplinaria de Ingeniería, Campus Hidalgo (UPIIH)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.

Original language	English
Title of host publication	2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728189871
DOIs	https://doi.org/10.1109/CCE50788.2020.9299123
State	Published - 11 Nov 2020
Event	17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020 - Virtual, Mexico City, Mexico Duration: 11 Nov 2020 → 13 Nov 2020

Publication series

Name	2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020

Conference

Conference	17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020
Country/Territory	Mexico
City	Virtual, Mexico City
Period	11/11/20 → 13/11/20

Keywords

FGMOS
Linear Electrostatic Micromotor
MEMS
Position Sensor

Access to Document

10.1109/CCE50788.2020.9299123

Cite this

Lopez-Tapia, A., Reyes-Barranca, M. A., Stephany Abarca-Jimenez, G., Sanchez-Marquez, L., & Flores-Nava, L. M. (2020). Design of position sensor of a linear micromotor based on CMOS-MEMS technology. In 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020 Article 9299123 (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CCE50788.2020.9299123

Lopez-Tapia, Andrea ; Reyes-Barranca, Mario Alfredo ; Stephany Abarca-Jimenez, Griselda et al. / Design of position sensor of a linear micromotor based on CMOS-MEMS technology. 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020).

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title = "Design of position sensor of a linear micromotor based on CMOS-MEMS technology",

abstract = "This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.",

keywords = "FGMOS, Linear Electrostatic Micromotor, MEMS, Position Sensor",

author = "Andrea Lopez-Tapia and Reyes-Barranca, {Mario Alfredo} and {Stephany Abarca-Jimenez}, Griselda and Luis Sanchez-Marquez and Flores-Nava, {Luis Martin}",

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doi = "10.1109/CCE50788.2020.9299123",

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Lopez-Tapia, A, Reyes-Barranca, MA, Stephany Abarca-Jimenez, G, Sanchez-Marquez, L & Flores-Nava, LM 2020, Design of position sensor of a linear micromotor based on CMOS-MEMS technology. in 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020., 9299123, 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020, Institute of Electrical and Electronics Engineers Inc., 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020, Virtual, Mexico City, Mexico, 11/11/20. https://doi.org/10.1109/CCE50788.2020.9299123

Design of position sensor of a linear micromotor based on CMOS-MEMS technology. / Lopez-Tapia, Andrea; Reyes-Barranca, Mario Alfredo; Stephany Abarca-Jimenez, Griselda et al.
2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. 9299123 (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Lopez-Tapia, Andrea

AU - Reyes-Barranca, Mario Alfredo

AU - Stephany Abarca-Jimenez, Griselda

AU - Sanchez-Marquez, Luis

AU - Flores-Nava, Luis Martin

PY - 2020/11/11

Y1 - 2020/11/11

N2 - This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.

AB - This paper shows the design of the position sensor, consisting on a structure composed by a structural aluminum layer whose purpose is to act as a linear electrostatic micromotor; it has also a polysilicon layer acting as part of the proposed position sensor, which will operate as a floating gate of a MOS transistor (FGMOS). This structure is designed under the rules of the standard 0.5 micron CMOS technology. Through this, a relation between the position of the micromotor and the current through the FGMOS is obtained. The simulations were obtained using PSpice.

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KW - Linear Electrostatic Micromotor

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KW - Position Sensor

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BT - 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020

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Lopez-Tapia A, Reyes-Barranca MA, Stephany Abarca-Jimenez G, Sanchez-Marquez L, Flores-Nava LM. Design of position sensor of a linear micromotor based on CMOS-MEMS technology. In 2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020. Institute of Electrical and Electronics Engineers Inc. 2020. 9299123. (2020 17th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2020). doi: 10.1109/CCE50788.2020.9299123

Design of position sensor of a linear micromotor based on CMOS-MEMS technology

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