TY - GEN
T1 - Design considerations for monolithic integration of a micro hotplate temperature controller in a MEMS gas sensor
AU - Mendoza-Acevedo, S.
AU - Reyes-Barranca, M. A.
AU - Flores-Nava, L. M.
AU - Ávila-García, A.
AU - González-Vidal, J. L.
PY - 2009
Y1 - 2009
N2 - A control system to regulate the temperature of the micro hotplate in a MEMS gas sensor is presented. The controlelement, called micro hotplate, is comprised of a micro heater and a temperature sensor, both made with polysilicon, located near each other. This material has a Temperature Coefficient of Resistance (TCR) that is the basis for the design of the temperature controller of the gas sensor system. A high temperature between 250 and 400 ° C is needed to produce a chemical reaction between the gas and the sensing film, hence a reliable temperature control for the micro hotplate is desired. Thermal insulation of the circuitry from the heating element, having a monolithic sensor system, and low power consumption, are the main specifications for the system. This is obtained by means of a micro pit realized with MEMS micromachining processes. The analysis of the circuit proposed to fulfill these characteristics is presented, for its future integration with a standard CMOS technology. A trade off is established between the sensor structure parameters and the circuit design.
AB - A control system to regulate the temperature of the micro hotplate in a MEMS gas sensor is presented. The controlelement, called micro hotplate, is comprised of a micro heater and a temperature sensor, both made with polysilicon, located near each other. This material has a Temperature Coefficient of Resistance (TCR) that is the basis for the design of the temperature controller of the gas sensor system. A high temperature between 250 and 400 ° C is needed to produce a chemical reaction between the gas and the sensing film, hence a reliable temperature control for the micro hotplate is desired. Thermal insulation of the circuitry from the heating element, having a monolithic sensor system, and low power consumption, are the main specifications for the system. This is obtained by means of a micro pit realized with MEMS micromachining processes. The analysis of the circuit proposed to fulfill these characteristics is presented, for its future integration with a standard CMOS technology. A trade off is established between the sensor structure parameters and the circuit design.
KW - Control
KW - FGMOS
KW - Gas sensor
KW - MEMS
UR - http://www.scopus.com/inward/record.url?scp=77949788541&partnerID=8YFLogxK
U2 - 10.1109/ICEEE.2009.5393567
DO - 10.1109/ICEEE.2009.5393567
M3 - Contribución a la conferencia
AN - SCOPUS:77949788541
SN - 9781424446896
T3 - 2009 6th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2009
BT - 2009 6th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2009
T2 - 2009 6th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2009
Y2 - 10 November 2009 through 13 November 2009
ER -