Resumen
This paper presents the results of PL spectrum study for Si nano-clusters in amorphous silicon matrix. The hydrogenated amorphous Si layers were prepared by the hot-wire CVD method on glass substrates. The layers were deposited at different wafer temperatures 280, 360, 420 and 460 °C and at one filament temperature of 1650 °C. The joint analysis of PL and X-ray diffraction spectra in dependence on the technological conditions and on different sizes of Si nano-clusters has been done. The mechanisms of PL are discussed as well.
Idioma original | Inglés |
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Páginas (desde-hasta) | 2186-2189 |
Número de páginas | 4 |
Publicación | Journal of Non-Crystalline Solids |
Volumen | 354 |
N.º | 19-25 |
DOI | |
Estado | Publicada - 1 may. 2008 |