Correlation between the photoluminescence and different types of Si nano-clusters in amorphous silicon

T. V. Torchynska, A. L. Quintos Vazquez, G. Polupan, Y. Matsumoto, L. Khomenkova, L. Shcherbyna

Producción científica: Contribución a una revistaArtículorevisión exhaustiva

12 Citas (Scopus)

Resumen

This paper presents the results of PL spectrum study for Si nano-clusters in amorphous silicon matrix. The hydrogenated amorphous Si layers were prepared by the hot-wire CVD method on glass substrates. The layers were deposited at different wafer temperatures 280, 360, 420 and 460 °C and at one filament temperature of 1650 °C. The joint analysis of PL and X-ray diffraction spectra in dependence on the technological conditions and on different sizes of Si nano-clusters has been done. The mechanisms of PL are discussed as well.

Idioma originalInglés
Páginas (desde-hasta)2186-2189
Número de páginas4
PublicaciónJournal of Non-Crystalline Solids
Volumen354
N.º19-25
DOI
EstadoPublicada - 1 may. 2008

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