Resumen
The structural, electrical and optical properties of indium doped zinc oxide films, grown by spray pyrolysis are reported. The starting solution was zinc acetate diluted in a mixture of isopropyl alcohol and water to 0.1 M, the doping solution was an aqueous solution of indium nitrate. The films were grown at substrate temperatures ranging from 675 K to 800 K. X-ray diffraction and micrographs indicate that the films are polycrystalline with textured surfaces having a predominance of the (002) and (101) reflections, depending on the substrate temperature. They have a resistivity as low as 6 × 10-5Ω m and a transmittance better than 85% in the visible range.
Idioma original | Inglés |
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Páginas (desde-hasta) | 2905-2907 |
Número de páginas | 3 |
Publicación | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volumen | 15 |
N.º | 6 |
DOI | |
Estado | Publicada - 1997 |