The structural, electrical and optical properties of indium doped zinc oxide films, grown by spray pyrolysis are reported. The starting solution was zinc acetate diluted in a mixture of isopropyl alcohol and water to 0.1 M, the doping solution was an aqueous solution of indium nitrate. The films were grown at substrate temperatures ranging from 675 K to 800 K. X-ray diffraction and micrographs indicate that the films are polycrystalline with textured surfaces having a predominance of the (002) and (101) reflections, depending on the substrate temperature. They have a resistivity as low as 6 × 10-5Ω m and a transmittance better than 85% in the visible range. © 1997 American Vacuum Society.
|Original language||American English|
|Number of pages||2614|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|State||Published - 1 Jan 1997|
Maldonado, A., De La, M., Asomoza, R., Zironi, E. P., Cañetas-Ortega, J., & Palacios-Gómez, J. (1997). Characteristics of spray pyrolytic ZnO:In thin films grown from zinc acetate and indium nitrate. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2905-2907. https://doi.org/10.1116/1.580883