Characteristics of spray pyrolytic ZnO:In thin films grown from zinc acetate and indium nitrate

A. Maldonado, M. De La, R. Asomoza, E. P. Zironi, J. Cañetas-Ortega, J. Palacios-Gómez

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Abstract

The structural, electrical and optical properties of indium doped zinc oxide films, grown by spray pyrolysis are reported. The starting solution was zinc acetate diluted in a mixture of isopropyl alcohol and water to 0.1 M, the doping solution was an aqueous solution of indium nitrate. The films were grown at substrate temperatures ranging from 675 K to 800 K. X-ray diffraction and micrographs indicate that the films are polycrystalline with textured surfaces having a predominance of the (002) and (101) reflections, depending on the substrate temperature. They have a resistivity as low as 6 × 10-5Ω m and a transmittance better than 85% in the visible range. © 1997 American Vacuum Society.
Original languageAmerican English
Pages (from-to)2905-2907
Number of pages2614
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
DOIs
StatePublished - 1 Jan 1997
Externally publishedYes

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