Abstract
The structural, electrical and optical properties of indium doped zinc oxide films, grown by spray pyrolysis are reported. The starting solution was zinc acetate diluted in a mixture of isopropyl alcohol and water to 0.1 M, the doping solution was an aqueous solution of indium nitrate. The films were grown at substrate temperatures ranging from 675 K to 800 K. X-ray diffraction and micrographs indicate that the films are polycrystalline with textured surfaces having a predominance of the (002) and (101) reflections, depending on the substrate temperature. They have a resistivity as low as 6 × 10-5Ω m and a transmittance better than 85% in the visible range.
Original language | English |
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Pages (from-to) | 2905-2907 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 15 |
Issue number | 6 |
DOIs | |
State | Published - 1997 |