We present in this work the processing of large area CdS and CdTe thin films. We have been working for this purpose with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system with two 6-inch balanced guns, processing thin films in areas as large as 450 cm2 grown on soda-lime glasses. Conducting glasses (SnO2 of 7 Ω/□) were also used only for CdS deposition in order to further analyze the heterojunction CdS/CdTe. The best films have been processed with substrate temperatures (Ts) of 250°C for CdS and 215°C for CdTe; Ar chamber-pressure of 20 mtorr, radio frequency power of 300 W, and different deposition time between target materials. © 2002 Elsevier Science B.V. All rights resreved.
Hernández-Contreras, H., Contreras-Puente, G., Aguilar-Hernández, J., Morales-Acevedo, A., Vidal-Larramendi, J., & Vigil-Galán, O. (2002). CdS and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering. 148-152. Papel presentado en Thin Solid Films, . https://doi.org/10.1016/S0040-6090(01)01523-1