Abstract
We present in this work the processing of large area CdS and CdTe thin films. We have been working for this purpose with a Radio-Frequency Planar Magnetron Sputtering (RF-PMS) system with two 6-inch balanced guns, processing thin films in areas as large as 450 cm2 grown on soda-lime glasses. Conducting glasses (SnO2 of 7 Ω/□) were also used only for CdS deposition in order to further analyze the heterojunction CdS/CdTe. The best films have been processed with substrate temperatures (Ts) of 250°C for CdS and 215°C for CdTe; Ar chamber-pressure of 20 mtorr, radio frequency power of 300 W, and different deposition time between target materials.
Translated title of the contribution | Películas delgadas de área grande de CdS y CdTe procesadas por pulverización catódica de magnetrón planar de radiofrecuencia |
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Original language | English |
Pages (from-to) | 148-152 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 403-404 |
DOIs | |
State | Published - 1 Feb 2002 |
Event | Proceedings of Symposium P on Thin Film Materials for Photovolt E-MRS - Strasbourg, France Duration: 5 Jun 2001 → 8 Jun 2001 |
Keywords
- CdS
- CdTe
- Optical absorbtion
- Photoluminescence
- Radio-frequency planar-magnetron sputtering
- Resistivity
- X-rays