Texturado superficial de silicio mediante láser pulsado Silicon surface texturing by pulsed laser

L. Ponce; A. Castellanos; M. Arronte; T. Flores; E. Rodríguez; R. León; M. A. Montaigne

doi:10.3989/revmetalm.1998.v34.i2.678

Texturado superficial de silicio mediante láser pulsado Silicon surface texturing by pulsed laser

L. Ponce, A. Castellanos, M. Arronte, T. Flores, E. Rodríguez, R. León, M. A. Montaigne

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Texturing of silicon surfaces with pulsed laser is made. The method is based on the formation of laser-induced periodic surface structure (LIPSS). The process is temporary characterized through the dynamic reflectance, thus determining the formation threshold of the structure. Relation between the different textures and the spectral reflectance of the samples before and after the treatment is also characterized. The mean value of spectral reflectance decreases up to a 6 %.

Original language	English
Pages (from-to)	144-147
Number of pages	4
Journal	Revista de Metalurgia (Madrid)
Volume	34
Issue number	2
DOIs	https://doi.org/10.3989/revmetalm.1998.v34.i2.678
State	Published - 1998
Externally published	Yes

Keywords

LIPSS
Laser
Reflectance
Silicon
Texturing

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10.3989/revmetalm.1998.v34.i2.678

Cite this

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title = "Texturado superficial de silicio mediante l{\'a}ser pulsado Silicon surface texturing by pulsed laser",

abstract = "Texturing of silicon surfaces with pulsed laser is made. The method is based on the formation of laser-induced periodic surface structure (LIPSS). The process is temporary characterized through the dynamic reflectance, thus determining the formation threshold of the structure. Relation between the different textures and the spectral reflectance of the samples before and after the treatment is also characterized. The mean value of spectral reflectance decreases up to a 6 %.",

keywords = "LIPSS, Laser, Reflectance, Silicon, Texturing",

author = "L. Ponce and A. Castellanos and M. Arronte and T. Flores and E. Rodr{\'i}guez and R. Le{\'o}n and Montaigne, {M. A.}",

year = "1998",

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T1 - Texturado superficial de silicio mediante láser pulsado Silicon surface texturing by pulsed laser

AU - Ponce, L.

AU - Castellanos, A.

AU - Arronte, M.

AU - Flores, T.

AU - Rodríguez, E.

AU - León, R.

AU - Montaigne, M. A.

PY - 1998

Y1 - 1998

N2 - Texturing of silicon surfaces with pulsed laser is made. The method is based on the formation of laser-induced periodic surface structure (LIPSS). The process is temporary characterized through the dynamic reflectance, thus determining the formation threshold of the structure. Relation between the different textures and the spectral reflectance of the samples before and after the treatment is also characterized. The mean value of spectral reflectance decreases up to a 6 %.

AB - Texturing of silicon surfaces with pulsed laser is made. The method is based on the formation of laser-induced periodic surface structure (LIPSS). The process is temporary characterized through the dynamic reflectance, thus determining the formation threshold of the structure. Relation between the different textures and the spectral reflectance of the samples before and after the treatment is also characterized. The mean value of spectral reflectance decreases up to a 6 %.

KW - LIPSS

KW - Laser

KW - Reflectance

KW - Silicon

KW - Texturing

UR - http://www.scopus.com/inward/record.url?scp=0032020833&partnerID=8YFLogxK

U2 - 10.3989/revmetalm.1998.v34.i2.678

DO - 10.3989/revmetalm.1998.v34.i2.678

M3 - Artículo

AN - SCOPUS:0032020833

SN - 0034-8570

VL - 34

SP - 144

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JO - Revista de Metalurgia (Madrid)

JF - Revista de Metalurgia (Madrid)

IS - 2

ER -

Texturado superficial de silicio mediante láser pulsado Silicon surface texturing by pulsed laser

Abstract

Keywords

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