Fingerprint
Dive into the research topics of 'RF-magnetron sputtering deposition of ultra-thin Hf0.5Zr0.5O2 films for non-volatile memory applications'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
RF-magnetron sputtering deposition of ultra-thin Hf0.5Zr0.5O2 films for non-volatile memory applications
F. Ambriz-Vargas, R. Nouar, G. Kolhatkar, A. Sarkissian, R. Thomas, C. Gomez-Yáñez, M. A. Gauthier, A. Ruediger
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations