Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology

H. E. Martínez-Mateo, F. J. De La Hidalga-W, A. Torres, C. Zúñiga, M. Linares, J. Molina, M. Moreno, P. Rosales, C. Reyes, L. Hernández, L. Niño De Rivera, W. Calleja

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review