Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology

H. E. Martínez-Mateo; F. J. De La Hidalga-W; A. Torres; C. Zúñiga; M. Linares; J. Molina; M. Moreno; P. Rosales; C. Reyes; L. Hernández; L. Niño De Rivera; W. Calleja

Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology

H. E. Martínez-Mateo, F. J. De La Hidalga-W, A. Torres, C. Zúñiga, M. Linares, J. Molina, M. Moreno, P. Rosales, C. Reyes, L. Hernández, L. Niño De Rivera, W. Calleja

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

High-index silicon substrates are proposed as an alternative for the development of a new type of microsystems. Both bulk and surface micromachining techniques could be developed in combination with MOS circuits, offering new possibilities of applications, based on a combined intra- and post-processing approach without affecting the interface atomic texture of high-index substrates. As an example of microsystems on high-index silicon we present a culture cell design which can be developed taking into account the advantages of bulk micromachining and CMOS circuits. This example clarifies the aim of the new high-index silicon MEMS technology proposed in this work.

Original language	English
Title of host publication	EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012
Pages	101-105
Number of pages	5
State	Published - 2012
Externally published	Yes
Event	7th Argentine School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2012 - Cordoba, Argentina Duration: 4 Aug 2012 → 12 Aug 2012

Publication series

Name	EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012

Conference

Conference	7th Argentine School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2012
Country/Territory	Argentina
City	Cordoba
Period	4/08/12 → 12/08/12

Cite this

Martínez-Mateo, H. E., De La Hidalga-W, F. J., Torres, A., Zúñiga, C., Linares, M., Molina, J., Moreno, M., Rosales, P., Reyes, C., Hernández, L., De Rivera, L. N., & Calleja, W. (2012). Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology. In EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012 (pp. 101-105). Article 6297326 (EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012).

Martínez-Mateo, H. E. ; De La Hidalga-W, F. J. ; Torres, A. et al. / Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology. EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012. 2012. pp. 101-105 (EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012).

@inproceedings{4dc808b0856943748750ae995afacd03,

title = "Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology",

abstract = "High-index silicon substrates are proposed as an alternative for the development of a new type of microsystems. Both bulk and surface micromachining techniques could be developed in combination with MOS circuits, offering new possibilities of applications, based on a combined intra- and post-processing approach without affecting the interface atomic texture of high-index substrates. As an example of microsystems on high-index silicon we present a culture cell design which can be developed taking into account the advantages of bulk micromachining and CMOS circuits. This example clarifies the aim of the new high-index silicon MEMS technology proposed in this work.",

author = "Mart{\'i}nez-Mateo, {H. E.} and {De La Hidalga-W}, {F. J.} and A. Torres and C. Z{\'u}{\~n}iga and M. Linares and J. Molina and M. Moreno and P. Rosales and C. Reyes and L. Hern{\'a}ndez and {De Rivera}, {L. Ni{\~n}o} and W. Calleja",

year = "2012",

language = "Ingl{\'e}s",

isbn = "9789871620937",

series = "EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012",

pages = "101--105",

booktitle = "EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012",

note = "7th Argentine School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2012 ; Conference date: 04-08-2012 Through 12-08-2012",

}

Martínez-Mateo, HE, De La Hidalga-W, FJ, Torres, A, Zúñiga, C, Linares, M, Molina, J, Moreno, M, Rosales, P, Reyes, C, Hernández, L, De Rivera, LN & Calleja, W 2012, Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology. in EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012., 6297326, EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012, pp. 101-105, 7th Argentine School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2012, Cordoba, Argentina, 4/08/12.

Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology. / Martínez-Mateo, H. E.; De La Hidalga-W, F. J.; Torres, A. et al.
EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012. 2012. p. 101-105 6297326 (EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology

AU - Martínez-Mateo, H. E.

AU - De La Hidalga-W, F. J.

AU - Torres, A.

AU - Zúñiga, C.

AU - Linares, M.

AU - Molina, J.

AU - Moreno, M.

AU - Rosales, P.

AU - Reyes, C.

AU - Hernández, L.

AU - De Rivera, L. Niño

AU - Calleja, W.

PY - 2012

Y1 - 2012

N2 - High-index silicon substrates are proposed as an alternative for the development of a new type of microsystems. Both bulk and surface micromachining techniques could be developed in combination with MOS circuits, offering new possibilities of applications, based on a combined intra- and post-processing approach without affecting the interface atomic texture of high-index substrates. As an example of microsystems on high-index silicon we present a culture cell design which can be developed taking into account the advantages of bulk micromachining and CMOS circuits. This example clarifies the aim of the new high-index silicon MEMS technology proposed in this work.

AB - High-index silicon substrates are proposed as an alternative for the development of a new type of microsystems. Both bulk and surface micromachining techniques could be developed in combination with MOS circuits, offering new possibilities of applications, based on a combined intra- and post-processing approach without affecting the interface atomic texture of high-index substrates. As an example of microsystems on high-index silicon we present a culture cell design which can be developed taking into account the advantages of bulk micromachining and CMOS circuits. This example clarifies the aim of the new high-index silicon MEMS technology proposed in this work.

UR - http://www.scopus.com/inward/record.url?scp=84867917226&partnerID=8YFLogxK

M3 - Contribución a la conferencia

AN - SCOPUS:84867917226

SN - 9789871620937

T3 - EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012

SP - 101

EP - 105

BT - EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012

T2 - 7th Argentine School of Micro-Nanoelectronics, Technology and Applications, EAMTA 2012

Y2 - 4 August 2012 through 12 August 2012

ER -

Martínez-Mateo HE, De La Hidalga-W FJ, Torres A, Zúñiga C, Linares M, Molina J et al. Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology. In EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012. 2012. p. 101-105. 6297326. (EAMTA 2012 - Proceedings of the Argentine School of Micro-Nanoelectronics, Technology and Applications 2012).

Prospects for MEMS on high-index silicon combining bulk micromachining and PolyMEMS INAOE technology

Abstract

Publication series

Conference

Other files and links

Fingerprint

Cite this