Abstract
A study of AlGaAs/GaAs semiconductor heterostructures with a two-dimensional electron gas (2-DEG) system grown under different conditions by molecular beam epitaxy was presented. It was found that the sample with highest electron mobility exhibited the lowest electric field strength. The analysis suggested that the electron mobility was affected by unintentional C impurities which acted like dispersion centers in the 2-DEG and increased the internal electric fields in the GaAs region.
Original language | American English |
---|---|
Pages | 1238-1242 |
Number of pages | 5 |
DOIs | |
State | Published - 1 May 2002 |
Externally published | Yes |
Event | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures - Duration: 1 May 2002 → … |
Conference
Conference | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
---|---|
Period | 1/05/02 → … |