Oxygen implantation and diffusion in pure titanium by an rf inductively coupled plasma

R. Valencia-Alvarado, A. de la Piedad-Beneitez, R. López-Callejas, S. R. Barocio, A. Mercado-Cabrera, R. Peña-Eguiluz, A. E. Muñoz-Castro, J. de la Rosa-Vázquez

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