Emission and structure investigations of Si nano-crystals embedded in amorphous silicon

A. Vivas Hernandez, T. V. Torchynska, A. L.Quintos Vazquez, Yasuhiro Matsumoto, L. Khomenkova, L. Shcherbina

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17 Scopus citations

Abstract

The influence of oxygen flow at the hot-wire-CVD process on light-emission and structural properties of Si nano-crystallites embedded in amorphous silicon has been investigated. It was shown that increasing of an oxygen flow is accompanied by the Si nanocrystallite size variation and by the appearance of some new photoluminescence bands. Using of X-ray diffraction and photoluminescence methods the dependence of photoluminescence properties on the size of Si nanocrystallites was shown. The nature of light emission centers is discussed as well.

Translated title of the contributionInvestigaciones de emisión y estructura de nanocristales de Si incrustados en silicio amorfo
Original languageEnglish
Article number243
Pages (from-to)1231-1235
Number of pages5
JournalJournal of Physics: Conference Series
Volume61
Issue number1
DOIs
StatePublished - 1 Apr 2007

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