TY - JOUR
T1 - Electrical characterization of sputtered Ge:Sb:Te films using impedance measurements
AU - Morales-Sánchez, E.
AU - Prokhorov, E. F.
AU - Mendoza-Galván, A.
AU - González-Hernández, J.
N1 - Funding Information:
This work was partially supported by CONACyT of Mexico. The authors gratefully acknowledge M. Hernandez-Landaverde and J.E. Urbina for their help in the X-ray and EDS measurements.
PY - 2002/12/24
Y1 - 2002/12/24
N2 - The impedance measurements in Ge2Sb2Te5 thin amorphous films, as a function of temperature, have shown that the contacts have a strong influence on the electrical properties of these materials. These measurements also allow to separate the two contributions, contacts and material. It is found that, in all as-prepared films, the activation energy for conductance is 0.347 ± 0.026 eV. The impedance measurements reveal that, when the samples are heated in the temperature range between the glass transition and crystallization temperature, some nuclei appear. X-ray measurements have shown that these nuclei have the Ge1Sb4Te7 stoichiometric composition, which is gradually transformed into the Ge2Sb2Te5 cubic phase with further heating. Using the Maxwell-Wagner model the volume fraction of these nuclei was estimated in films with different thickness.
AB - The impedance measurements in Ge2Sb2Te5 thin amorphous films, as a function of temperature, have shown that the contacts have a strong influence on the electrical properties of these materials. These measurements also allow to separate the two contributions, contacts and material. It is found that, in all as-prepared films, the activation energy for conductance is 0.347 ± 0.026 eV. The impedance measurements reveal that, when the samples are heated in the temperature range between the glass transition and crystallization temperature, some nuclei appear. X-ray measurements have shown that these nuclei have the Ge1Sb4Te7 stoichiometric composition, which is gradually transformed into the Ge2Sb2Te5 cubic phase with further heating. Using the Maxwell-Wagner model the volume fraction of these nuclei was estimated in films with different thickness.
KW - Amorphous films
KW - Ge:Sb:Te
KW - Impedance measurements
KW - Phase change
UR - http://www.scopus.com/inward/record.url?scp=0037168686&partnerID=8YFLogxK
U2 - 10.1016/S0042-207X(02)00359-7
DO - 10.1016/S0042-207X(02)00359-7
M3 - Artículo
AN - SCOPUS:0037168686
SN - 0042-207X
VL - 69
SP - 361
EP - 364
JO - Vacuum
JF - Vacuum
IS - 1-3
ER -