Effect of xenon bombardment on ruthenium-coated grazing incidence collector mirror lifetime for extreme ultraviolet lithography

Martin Nieto, Jean Paul Allain, Vladimir Titov, Matthew R. Hendricks, Ahmed Hassanein, Daniel Rokusek, Christopher Chrobak, Charles Tarrio, Yaniv Barad, Steven Grantham, Thomas B. Lucatorto, Brian Rice

Research output: Contribution to journal › Article › peer-review