Effect of charged-particle bombardment on collector mirror reflectivity in EUV lithography devices

J. P. Allain, M. Nieto, A. Hassanein, V. Titov, P. Plotkin, M. Hendricks, E. Hinson, C. Chrobak, M. H.L. Van Der Velden, B. Rice

Research output: Contribution to conference › Paper

10 Scopus citations

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Medicine & Life Sciences