Diseño de un dispositivo sensor de masa tipo MEMS basado en microvigas en voladizo de polisilicio

Translated title of the contribution: Design of a MEMS mass sensor device based in oscillating polysilicon microcantilevers

R. Sánchez-Fraga, V. H. Ponce-Ponce, M. A. Ramírez-Salinas, H. Estrada-Vázquez, J. Munguía-Cervantes

Research output: Contribution to journal › Article › peer-review

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Engineering & Materials Science

Chemistry