Crystallization of SbTe phase change optical films

E. Morales-Sánchez, E. Prokhorov, J. González-Hernández, M. A. Hernández-Landaverde, B. Chao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The aim of this work was to investigate the crystallization properties and crystallization temperature in SbTe thin films, with different content of Sb, using DSC, optical reflection at 650 nm and XRD measurements. DSC studies showed that crystallization temperature of the films depend on the Sb content. XRD measurements have shown that films with low Sb contents (less that 73 at %) directly crystallized in orthorhombic Sb2nTe3 and films with higher Sb contents first crystallized in rhombohedral Sb phase and at more high temperature appear Sb2nTe3 stable crystalline phase. Optical measurements showed a gradual increase of reflectivity with the temperature depending on the Sb content. The results of this research show that it is possible to obtain mixtures with different crystallization temperatures, changing the Sb content in the SbTe alloys.

Original languageEnglish
Title of host publication2007 4th International Conference on Electrical and Electronics Engineering, ICEEE 2007
Pages330-332
Number of pages3
DOIs
StatePublished - 2007
Externally publishedYes
Event2007 4th International Conference on Electrical and Electronics Engineering, ICEEE 2007 - Mexico City, Mexico
Duration: 5 Sep 20077 Sep 2007

Publication series

Name2007 4th International Conference on Electrical and Electronics Engineering, ICEEE 2007

Conference

Conference2007 4th International Conference on Electrical and Electronics Engineering, ICEEE 2007
Country/TerritoryMexico
CityMexico City
Period5/09/077/09/07

Keywords

  • Crystallization temperature
  • DRX
  • Thin films

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