Characterization of wurtzite type ZnS grown by RF magnetron sputtering

Joel Díaz-Reyes, Roberto S. Castillo-Ojeda, Javier Martínez-Juárez

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

ZnS was grown on (001) GaAs substrates at different temperatures by RF magnetron sputtering. ZnS chemical stoichiometry was determined by energydispersive X-ray spectroscopy (EDS). The XRD analysis and Raman scattering reveal that ZnS deposited thin films showed hexagonal crystalline phase wurtzite type. The average crystallite size range of the film was from 8.15 to 31.95 nm, which was determined using the Scherrer–Debye equation on diffractograms. Besides, an experimental study on first- and second-order Raman scattering of ZnS films is made. The observed emission peaks in the room temperature photoluminescence spectra are associated at oxygen traps and interstitial sulphur.

Original languageEnglish
Title of host publicationMaterials Characterization
PublisherSpringer International Publishing
Pages189-196
Number of pages8
ISBN (Electronic)9783319152042
ISBN (Print)9783319152035
DOIs
StatePublished - 1 Jan 2015

Keywords

  • Crystalline
  • Energy-dispersive x-ray spectroscopy (eds)
  • Rf magnetron sputtering
  • Wurtzite
  • Xrd

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