Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

J. Hamisch; J. de la Rosa

doi:10.1007/BF00695622

Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

J. Hamisch, J. de la Rosa

Research output: Contribution to journal › Article › peer-review

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Abstract

To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.

Original language	English
Pages (from-to)	189-195
Number of pages	7
Journal	Applied Physics B Photophysics and Laser Chemistry
Volume	43
Issue number	3
DOIs	https://doi.org/10.1007/BF00695622
State	Published - Jul 1987
Externally published	Yes

Keywords

42.55.Hq
52.80.Hc
79.20.Nc

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10.1007/BF00695622

Cite this

@article{d35b14a120de4d258e0e10e8e5fe45e5,

title = "Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering",

abstract = "To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.",

keywords = "42.55.Hq, 52.80.Hc, 79.20.Nc",

author = "J. Hamisch and {de la Rosa}, J.",

year = "1987",

month = jul,

doi = "10.1007/BF00695622",

language = "Ingl{\'e}s",

volume = "43",

pages = "189--195",

journal = "Applied Physics B Photophysics and Laser Chemistry",

issn = "0721-7269",

number = "3",

}

TY - JOUR

T1 - Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

AU - Hamisch, J.

AU - de la Rosa, J.

PY - 1987/7

Y1 - 1987/7

N2 - To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.

AB - To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.

KW - 42.55.Hq

KW - 52.80.Hc

KW - 79.20.Nc

UR - http://www.scopus.com/inward/record.url?scp=0023382004&partnerID=8YFLogxK

U2 - 10.1007/BF00695622

DO - 10.1007/BF00695622

M3 - Artículo

SN - 0721-7269

VL - 43

SP - 189

EP - 195

JO - Applied Physics B Photophysics and Laser Chemistry

JF - Applied Physics B Photophysics and Laser Chemistry

IS - 3

ER -

Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

Abstract

Keywords

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