Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

J. Hamisch, J. de la Rosa

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10 Citations (Scopus)

Abstract

To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas. © 1987 Springer-Verlag.
Original languageAmerican English
Pages (from-to)189-195
Number of pages169
JournalApplied Physics B Photophysics and Laser Chemistry
DOIs
StatePublished - 1 Jul 1987
Externally publishedYes

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Sputtering
Cathodes
Copper
Glow discharges
Erosion
Experiments

Cite this

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abstract = "To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas. {\circledC} 1987 Springer-Verlag.",
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