Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

J. Hamisch; J. de la Rosa

doi:10.1007/BF00695622

Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

J. Hamisch, J. de la Rosa

Producción científica: Contribución a una revista › Artículo › revisión exhaustiva

10 Citas (Scopus)

Resumen

To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.

Idioma original	Inglés
Páginas (desde-hasta)	189-195
Número de páginas	7
Publicación	Applied Physics B Photophysics and Laser Chemistry
Volumen	43
N.º	3
DOI	https://doi.org/10.1007/BF00695622
Estado	Publicada - jul. 1987
Publicado de forma externa	Sí

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10.1007/BF00695622

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abstract = "To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.",

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AB - To fine the reasons for the distortion of a cylindrical hollow cathode into a row of hollow spheres, the system of diffusion equations for the three most important types of particles in the hollow cathode discharge is solved, taking into consideration the essential source terms. In qualitative agreement with the experiments, the results show inhomogeneities of the cathode erosion at the cathode edges and at the boundary between hollow cathode discharge and normal glow discharge areas.

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KW - 52.80.Hc

KW - 79.20.Nc

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JO - Applied Physics B Photophysics and Laser Chemistry

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Calculation of geometrical changes in cylindrical copper hollow cathodes due to sputtering

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