ArF laser excited in a capacitively coupled discharge tube

J. De La Rosa, H. J. Eichler, H. Herweg

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.
Original languageAmerican English
Pages (from-to)1598-1599
Number of pages1438
JournalJournal of Applied Physics
DOIs
StatePublished - 1 Dec 1988
Externally publishedYes

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Excimer Lasers
gas discharge tubes
lasing
high voltages
Lasers
generators
capacitance
electric potential
wavelengths
lasers
energy

Cite this

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title = "ArF laser excited in a capacitively coupled discharge tube",
abstract = "Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.",
author = "{De La Rosa}, J. and Eichler, {H. J.} and H. Herweg",
year = "1988",
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ArF laser excited in a capacitively coupled discharge tube. / De La Rosa, J.; Eichler, H. J.; Herweg, H.

In: Journal of Applied Physics, 01.12.1988, p. 1598-1599.

Research output: Contribution to journalArticle

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AU - Herweg, H.

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AB - Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

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