ArF laser excited in a capacitively coupled discharge tube

J. De La Rosa; H. J. Eichler; H. Herweg

doi:10.1063/1.341797

ArF laser excited in a capacitively coupled discharge tube

J. De La Rosa, H. J. Eichler, H. Herweg

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

Original language	English
Pages (from-to)	1598-1599
Number of pages	2
Journal	Journal of Applied Physics
Volume	64
Issue number	3
DOIs	https://doi.org/10.1063/1.341797
State	Published - 1988
Externally published	Yes

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title = "ArF laser excited in a capacitively coupled discharge tube",

abstract = "Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.",

author = "{De La Rosa}, J. and Eichler, {H. J.} and H. Herweg",

year = "1988",

doi = "10.1063/1.341797",

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journal = "Journal of Applied Physics",

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T1 - ArF laser excited in a capacitively coupled discharge tube

AU - De La Rosa, J.

AU - Eichler, H. J.

AU - Herweg, H.

PY - 1988

Y1 - 1988

N2 - Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

AB - Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

UR - http://www.scopus.com/inward/record.url?scp=0009030208&partnerID=8YFLogxK

U2 - 10.1063/1.341797

DO - 10.1063/1.341797

M3 - Artículo

SN - 0021-8979

VL - 64

SP - 1598

EP - 1599

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 3

ER -

ArF laser excited in a capacitively coupled discharge tube

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