ArF laser excited in a capacitively coupled discharge tube

J. De La Rosa; H. J. Eichler; H. Herweg

doi:10.1063/1.341797

ArF laser excited in a capacitively coupled discharge tube

J. De La Rosa, H. J. Eichler, H. Herweg

Producción científica: Contribución a una revista › Artículo › revisión exhaustiva

2 Citas (Scopus)

Resumen

Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

Idioma original	Inglés
Páginas (desde-hasta)	1598-1599
Número de páginas	2
Publicación	Journal of Applied Physics
Volumen	64
N.º	3
DOI	https://doi.org/10.1063/1.341797
Estado	Publicada - 1988
Publicado de forma externa	Sí

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@article{83efb7b3369649cabef92f69fcc8d1db,

title = "ArF laser excited in a capacitively coupled discharge tube",

abstract = "Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.",

author = "{De La Rosa}, J. and Eichler, {H. J.} and H. Herweg",

year = "1988",

doi = "10.1063/1.341797",

language = "Ingl{\'e}s",

volume = "64",

pages = "1598--1599",

journal = "Journal of Applied Physics",

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number = "3",

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TY - JOUR

T1 - ArF laser excited in a capacitively coupled discharge tube

AU - De La Rosa, J.

AU - Eichler, H. J.

AU - Herweg, H.

PY - 1988

Y1 - 1988

N2 - Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

AB - Lasing in ArF was obtained with a longitudinal capacitively coupled high-voltage discharge. A laser energy of 15 μJ at 193-nm wavelength has been obtained by discharging a two-stage Marx generator with 60 pF capacitance and a voltage of 80 kV per stage into a discharge tube with a length of 35 cm and 2 mm inner diameter.

UR - http://www.scopus.com/inward/record.url?scp=0009030208&partnerID=8YFLogxK

U2 - 10.1063/1.341797

DO - 10.1063/1.341797

M3 - Artículo

SN - 0021-8979

VL - 64

SP - 1598

EP - 1599

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 3

ER -

ArF laser excited in a capacitively coupled discharge tube

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