Research output per year
Research output per year
Research output
- 1 Article
-
Process parameters affecting plasma enhanced crystallization of a-Si : H using a PECVD equipment
Garcia, R., Estrada, M., Cerdeira, A., Resendiz, L. & IEEE, 2002, In: 2002 23rd International Conference on Microelectronics, Vols 1 and 2, Proceedings.Research output: Contribution to journal › Article › peer-review