Temperature-power simultaneous effect on physical properties of Ba_xSr_1-x TiO₃ thin films deposited by RF-magnetron cosputtering for 0 ≤ x ≤1

The combined effect on the variation of the in-situ deposition temperature and the variation of the applied power on the deposition rate (DR), gap energy (E_g), and resistivity (ρ) in barium strontium titanate thin films, deposited into RF (radio frequency)-magnetron cosputtering equipment, are presented in this research. The simultaneous action of two magnetrons (BaTiO₃ and SrTiO₃) is explained using the first and second derivative of Boltzmann's sigmoidal equation. This found that a deposition gradient is a very novel analysis. Using the color-code lines built through MATLAB^® and analyzing the trend information, taking into account the influence of the calculated "x" parameter, by means of the Boltzmann's sigmoidal equation fit, we propose a method to set up an RF-magnetron cosputtering system to predict the DR(x,T), E_g(x,T), and ρ(x,T) values of Ba_xSr_1-xTiO₃ solid solutions with 0 ≤ x ≤ 1 for amorphous and crystalline phases. This method can be a versatile tool to optimize the deposition process with, or without, in situ deposition temperature.