Structural properties of porous silicon obtained with laser photoetching assisted by computerized numeric control

Ingeniería y ciencia de los materiales

• Porous silicon 100%
• Structural properties 72%
• Lasers 50%
• Crystalline materials 15%
• X rays 13%
• Scanning electron microscopy 11%
• Silicon 11%
• Hydrofluoric acid 11%
• Raman scattering 10%
• Hydrogen peroxide 9%
• Fourier transform infrared spectroscopy 9%
• Topography 8%
• Spectroscopy 8%
• Light sources 8%
• Etching 8%
• Diffraction 8%
• Ethanol 7%
• Oxidation 6%
• Wavelength 6%
• Oxygen 6%
• Substrates 5%

Física y astronomía

• porous silicon 72%
• lasers 29%
• scanning electron microscopy 9%
• bending vibration 9%
• hydrofluoric acid 9%
• hydrogen peroxide 9%
• silicon 8%
• x ray spectroscopy 7%
• ethyl alcohol 7%
• topography 6%
• infrared spectroscopy 6%
• x ray diffraction 6%
• light sources 6%
• Raman spectra 5%
• etching 5%
• oxidation 5%
• preparation 5%
• porosity 5%
• oxygen 4%
• wavelengths 3%
• energy 2%

Química

• Porosity 39%
• Bending Vibration 8%
• Scanning Electron Microscopy 8%
• Tension 6%
• Etching 6%
• Hydrogen Peroxide 5%
• Wavelength 4%
• IR Spectroscopy 4%
• Pore 4%
• Ethanol 4%
• Spectroscopy 4%
• Dioxygen 3%
• Time 2%
• Acid 2%
• Surface 2%