TY - JOUR
T1 - Structural analysis of Cd-Te-O films prepared by RF reactive sputtering
AU - Caballero-Briones, F.
AU - Peña, J. L.
AU - Martel, A.
AU - Iribarren, A.
AU - Calzadilla, O.
AU - Jiménez-Sandoval, S.
AU - Zapata-Navarro, Á
N1 - Funding Information:
FCB acknowledges Instituto Politecnico Nacional-Mexico for the EDI and SIBE grants and to CINVESTAV-Merida for the research facilities. JLP acknowledges CONACYT-Mexico for the financial support under 50360-Y contract. The authors would thank to Dra. P. Quintana for the XRD measurements. Technical support from M. Herrera, V. Rejon, R. Sanchez, O. Gomez, W. Cauich and D. Aguilar and secretarial assistance from L. Pinelo at CINVESTAV-Merida, and technical support from F. Rodriguez-Melgarejo and C. Zuñiga at CINVESTAV-Qro are kindly acknowledged too.
PY - 2008/8/1
Y1 - 2008/8/1
N2 - Crystalline and microcrystalline Cd-Te-O samples have been obtained by RF reactive sputtering from a CdTe target using N2O as oxidant. The growth conditions were substrate temperatures of 323 K, 573 K and 773 K and cathode voltage of -400 V, corresponding to 30 W of forward power. The samples were studied by micro-Raman spectroscopy, X-ray diffraction and optical transmittance. The films are remarkably transparent in the visible range, with transmittances about 88% at 400 nm and band gap energies above the absorption edge of the glass substrates. Although only the samples prepared at 773 K present defined diffraction peaks, the analysis of the Raman spectra indicate that samples prepared at 323 K and 573 K have a defined microstructure indeed. The spectra fitting performed by comparison with pattern compounds demonstrate that Cd-Te-O films are formed of Te-O units similar to those present in metal oxide-doped tellurite glasses, such as TeO3 and TeO3 + 1 linked through Cd-O bonds. As the substrate temperature increases the microstructure evolves from a γ-TeO2 richer state to CdxTeyOz. In the crystalline sample the main phase identified was CdTeO3 even though evidence of other phases was observed.
AB - Crystalline and microcrystalline Cd-Te-O samples have been obtained by RF reactive sputtering from a CdTe target using N2O as oxidant. The growth conditions were substrate temperatures of 323 K, 573 K and 773 K and cathode voltage of -400 V, corresponding to 30 W of forward power. The samples were studied by micro-Raman spectroscopy, X-ray diffraction and optical transmittance. The films are remarkably transparent in the visible range, with transmittances about 88% at 400 nm and band gap energies above the absorption edge of the glass substrates. Although only the samples prepared at 773 K present defined diffraction peaks, the analysis of the Raman spectra indicate that samples prepared at 323 K and 573 K have a defined microstructure indeed. The spectra fitting performed by comparison with pattern compounds demonstrate that Cd-Te-O films are formed of Te-O units similar to those present in metal oxide-doped tellurite glasses, such as TeO3 and TeO3 + 1 linked through Cd-O bonds. As the substrate temperature increases the microstructure evolves from a γ-TeO2 richer state to CdxTeyOz. In the crystalline sample the main phase identified was CdTeO3 even though evidence of other phases was observed.
KW - II-VI semiconductors
KW - Microcrystallinity
KW - Optical spectroscopy
KW - Raman scattering
KW - Raman spectroscopy
KW - Short-range order
KW - Sputtering
KW - Tellurites
KW - X-ray diffraction
UR - http://www.scopus.com/inward/record.url?scp=45049087729&partnerID=8YFLogxK
U2 - 10.1016/j.jnoncrysol.2008.03.042
DO - 10.1016/j.jnoncrysol.2008.03.042
M3 - Artículo
SN - 0022-3093
VL - 354
SP - 3756
EP - 3761
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
IS - 31
ER -