TY - GEN
T1 - Pull-in control in MEMS using curved surfaces
AU - Hernández-Rosas, J.
AU - Esquivel-Sirvent, R.
PY - 2007
Y1 - 2007
N2 - The stability of MEMS and NEMS is studied when smoothly curved surfaces are used in the device. The case of electrostatic and Casimir actuated MEMS-NEMS modeled by simple lumped systems is considered. The analysis is based on the proximity force approximation or Derjaguin approximation. As compared with the parallel plate configuration, the use of curved elements increases the stability of the device significantly, resulting in smaller devices. The curvature of the elements allows a control of the critical length scale at which a jump-to-contact occurs.
AB - The stability of MEMS and NEMS is studied when smoothly curved surfaces are used in the device. The case of electrostatic and Casimir actuated MEMS-NEMS modeled by simple lumped systems is considered. The analysis is based on the proximity force approximation or Derjaguin approximation. As compared with the parallel plate configuration, the use of curved elements increases the stability of the device significantly, resulting in smaller devices. The curvature of the elements allows a control of the critical length scale at which a jump-to-contact occurs.
UR - http://www.scopus.com/inward/record.url?scp=71749086849&partnerID=8YFLogxK
U2 - 10.1063/1.2825124
DO - 10.1063/1.2825124
M3 - Contribución a la conferencia
AN - SCOPUS:71749086849
SN - 9780735404748
T3 - AIP Conference Proceedings
SP - 222
EP - 230
BT - Advanced Summer School in Physics 2007 - Frontiers in Contemporary Physics, EAV07
T2 - 3rd Advanced Summer School in Physics: Frontiers in Contemporary Physics, EAV07
Y2 - 9 July 2007 through 13 July 2007
ER -