Preparation of iridium and platinum films by MOCVD and their properties

T. Goto; R. Vargas; T. Hirai

doi:10.1051/jp4:1993341

Preparation of iridium and platinum films by MOCVD and their properties

T. Goto, R. Vargas, T. Hirai

Producción científica: Contribución a una revista › Artículo de la conferencia › revisión exhaustiva

38 Citas (Scopus)

Resumen

Noble metals (Ir, Pt) films were prepared by MOCVD using metal-acetylacetonate precursors. The effects of deposition conditions on depositions rates, composition and microstructure were studied, and the optimum conditions were determined. A small amount of oxygen addition to the source gas was effective to prepare high-purity films. Epitaxially grown films were obtained on several kinds of single crystalline substrates. Black-colored powdery films containing impurity carbon were prepared without oxygen addition. These black films consists of fine particles about several nanometer in size. Ir films prepared without oxygen addition showed superior electrical and catalytic properties as an electrode for zirconia solid electrolytes particularly below 600°C.

Idioma original	Inglés
Páginas (desde-hasta)	297-304
Número de páginas	8
Publicación	Journal De Physique. IV : JP
Volumen	3
N.º	3
DOI	https://doi.org/10.1051/jp4:1993341
Estado	Publicada - 1993
Publicado de forma externa	Sí
Evento	Proceedings of the 9th European Conference on Chemical Vapour Deposition - Tampere, Finl Duración: 22 ago. 1993 → 27 ago. 1993

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abstract = "Noble metals (Ir, Pt) films were prepared by MOCVD using metal-acetylacetonate precursors. The effects of deposition conditions on depositions rates, composition and microstructure were studied, and the optimum conditions were determined. A small amount of oxygen addition to the source gas was effective to prepare high-purity films. Epitaxially grown films were obtained on several kinds of single crystalline substrates. Black-colored powdery films containing impurity carbon were prepared without oxygen addition. These black films consists of fine particles about several nanometer in size. Ir films prepared without oxygen addition showed superior electrical and catalytic properties as an electrode for zirconia solid electrolytes particularly below 600°C.",

author = "T. Goto and R. Vargas and T. Hirai",

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TY - JOUR

T1 - Preparation of iridium and platinum films by MOCVD and their properties

AU - Goto, T.

AU - Vargas, R.

AU - Hirai, T.

PY - 1993

Y1 - 1993

N2 - Noble metals (Ir, Pt) films were prepared by MOCVD using metal-acetylacetonate precursors. The effects of deposition conditions on depositions rates, composition and microstructure were studied, and the optimum conditions were determined. A small amount of oxygen addition to the source gas was effective to prepare high-purity films. Epitaxially grown films were obtained on several kinds of single crystalline substrates. Black-colored powdery films containing impurity carbon were prepared without oxygen addition. These black films consists of fine particles about several nanometer in size. Ir films prepared without oxygen addition showed superior electrical and catalytic properties as an electrode for zirconia solid electrolytes particularly below 600°C.

AB - Noble metals (Ir, Pt) films were prepared by MOCVD using metal-acetylacetonate precursors. The effects of deposition conditions on depositions rates, composition and microstructure were studied, and the optimum conditions were determined. A small amount of oxygen addition to the source gas was effective to prepare high-purity films. Epitaxially grown films were obtained on several kinds of single crystalline substrates. Black-colored powdery films containing impurity carbon were prepared without oxygen addition. These black films consists of fine particles about several nanometer in size. Ir films prepared without oxygen addition showed superior electrical and catalytic properties as an electrode for zirconia solid electrolytes particularly below 600°C.

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U2 - 10.1051/jp4:1993341

DO - 10.1051/jp4:1993341

M3 - Artículo de la conferencia

AN - SCOPUS:0342693810

SN - 1155-4339

VL - 3

SP - 297

EP - 304

JO - Journal De Physique. IV : JP

JF - Journal De Physique. IV : JP

IS - 3

T2 - Proceedings of the 9th European Conference on Chemical Vapour Deposition

Y2 - 22 August 1993 through 27 August 1993

ER -

Preparation of iridium and platinum films by MOCVD and their properties

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