TY - JOUR
T1 - Photoluminescence of silicon oxide films enriched by Si or Ge
AU - Torchynska, T. V.
AU - Aguilar-Hernandez, J.
AU - Hernández, L. Schacht
AU - Goldstein, Y.
AU - Many, A.
AU - Jedrzejewski, J.
AU - Kolobov, A. V.
N1 - Funding Information:
This work was supported by the CONACYT (Project 33427-U and International cooperation project Mexico–Israel), as well as by the CGPI-IPN Mexico.
PY - 2003/5
Y1 - 2003/5
N2 - Photoluminescence (PL) and Raman spectra of silicon oxide films enriched by Si or Ge have been investigated before and after thermal annealing at 1150°C and 800°C, respectively. The dependences of PL peculiarities on the concentration of Si and Ge, as well as on the existence (or absence) of Si (Ge) quantum dots in silicon oxide films are analyzed. It is concluded that the PL spectrum of the oxide films enriched with Ge and at least the high-energy part of the spectrum of the films enriched with Si are due to defects in the silicon oxide films.
AB - Photoluminescence (PL) and Raman spectra of silicon oxide films enriched by Si or Ge have been investigated before and after thermal annealing at 1150°C and 800°C, respectively. The dependences of PL peculiarities on the concentration of Si and Ge, as well as on the existence (or absence) of Si (Ge) quantum dots in silicon oxide films are analyzed. It is concluded that the PL spectrum of the oxide films enriched with Ge and at least the high-energy part of the spectrum of the films enriched with Si are due to defects in the silicon oxide films.
KW - Nanocrystalline Ge
KW - Nanocrystalline Si
KW - Photoluminescence
KW - Quantum confinement
UR - http://www.scopus.com/inward/record.url?scp=19244379014&partnerID=8YFLogxK
U2 - 10.1016/S0022-2313(02)00607-5
DO - 10.1016/S0022-2313(02)00607-5
M3 - Artículo de la conferencia
AN - SCOPUS:19244379014
SN - 0022-2313
VL - 102-103
SP - 557
EP - 561
JO - Journal of Luminescence
JF - Journal of Luminescence
IS - SPEC
T2 - Proceedings of the 2002 International Conference on Luminescence
Y2 - 24 August 2002 through 29 August 2002
ER -