Películas delgadas de óxido de aluminio con constante dieléctrica alta depositadas por rocío pirolítico a partir de precursores orgánicos e inorgánicos

J. Guzmán; M. García-Hipólito; T. Alejos; L. Martínez; L. Pérez; M. Aguilar; C. Falcony; O. Sánchez

Películas delgadas de óxido de aluminio con constante dieléctrica alta depositadas por rocío pirolítico a partir de precursores orgánicos e inorgánicos

J. Guzmán, M. García-Hipólito, T. Alejos, L. Martínez, L. Pérez, M. Aguilar, C. Falcony, O. Sánchez

Producción científica: Contribución a una revista › Artículo › revisión exhaustiva

Resumen

Aluminum oxide thin films were prepared on silicon from inorganic and organic reagents; Al(NO₃)₃and Al(acac₃) ₃, using the ultrasonic spray pyrolysis technique. A comparison about their optical, structural and electrical properties is carried out. Aluminum oxide thin films obtained from Al(NO₃)₃ resulted of good quality when compared to the same films obtained from Al(acac)₃. Stoichiometric films with a refractive index close to 1.66 were obtained when a 0.2M Al(NO₃)₃ solution was used. The films as deposited resulted almost free from -OH related bonds and are able to stand electric fields up to 2 MV/cm with a dielectric constant of 7.95.

Idioma original	Español
Páginas (desde-hasta)	79-82
Número de páginas	4
Publicación	Revista Mexicana de Fisica
Volumen	51
N.º	2 SUPPL.
Estado	Publicada - jun. 2005
Publicado de forma externa	Sí

Palabras clave

Dielectric constant
Electrical properties
Spray pyrolysis

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title = "Pel{\'i}culas delgadas de {\'o}xido de aluminio con constante diel{\'e}ctrica alta depositadas por roc{\'i}o pirol{\'i}tico a partir de precursores org{\'a}nicos e inorg{\'a}nicos",

abstract = "Aluminum oxide thin films were prepared on silicon from inorganic and organic reagents; Al(NO3)3and Al(acac3) 3, using the ultrasonic spray pyrolysis technique. A comparison about their optical, structural and electrical properties is carried out. Aluminum oxide thin films obtained from Al(NO3)3 resulted of good quality when compared to the same films obtained from Al(acac)3. Stoichiometric films with a refractive index close to 1.66 were obtained when a 0.2M Al(NO3)3 solution was used. The films as deposited resulted almost free from -OH related bonds and are able to stand electric fields up to 2 MV/cm with a dielectric constant of 7.95.",

keywords = "Dielectric constant, Electrical properties, Spray pyrolysis",

author = "J. Guzm{\'a}n and M. Garc{\'i}a-Hip{\'o}lito and T. Alejos and L. Mart{\'i}nez and L. P{\'e}rez and M. Aguilar and C. Falcony and O. S{\'a}nchez",

year = "2005",

month = jun,

language = "Espa{\~n}ol",

volume = "51",

pages = "79--82",

journal = "Revista Mexicana de Fisica",

issn = "0035-001X",

number = "2 SUPPL.",

}

Películas delgadas de óxido de aluminio con constante dieléctrica alta depositadas por rocío pirolítico a partir de precursores orgánicos e inorgánicos. / Guzmán, J.; García-Hipólito, M.; Alejos, T. et al.
En: Revista Mexicana de Fisica, Vol. 51, N.º 2 SUPPL., 06.2005, p. 79-82.

Producción científica: Contribución a una revista › Artículo › revisión exhaustiva

TY - JOUR

T1 - Películas delgadas de óxido de aluminio con constante dieléctrica alta depositadas por rocío pirolítico a partir de precursores orgánicos e inorgánicos

AU - Guzmán, J.

AU - García-Hipólito, M.

AU - Alejos, T.

AU - Martínez, L.

AU - Pérez, L.

AU - Aguilar, M.

AU - Falcony, C.

AU - Sánchez, O.

PY - 2005/6

Y1 - 2005/6

N2 - Aluminum oxide thin films were prepared on silicon from inorganic and organic reagents; Al(NO3)3and Al(acac3) 3, using the ultrasonic spray pyrolysis technique. A comparison about their optical, structural and electrical properties is carried out. Aluminum oxide thin films obtained from Al(NO3)3 resulted of good quality when compared to the same films obtained from Al(acac)3. Stoichiometric films with a refractive index close to 1.66 were obtained when a 0.2M Al(NO3)3 solution was used. The films as deposited resulted almost free from -OH related bonds and are able to stand electric fields up to 2 MV/cm with a dielectric constant of 7.95.

AB - Aluminum oxide thin films were prepared on silicon from inorganic and organic reagents; Al(NO3)3and Al(acac3) 3, using the ultrasonic spray pyrolysis technique. A comparison about their optical, structural and electrical properties is carried out. Aluminum oxide thin films obtained from Al(NO3)3 resulted of good quality when compared to the same films obtained from Al(acac)3. Stoichiometric films with a refractive index close to 1.66 were obtained when a 0.2M Al(NO3)3 solution was used. The films as deposited resulted almost free from -OH related bonds and are able to stand electric fields up to 2 MV/cm with a dielectric constant of 7.95.

KW - Dielectric constant

KW - Electrical properties

KW - Spray pyrolysis

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VL - 51

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JO - Revista Mexicana de Fisica

JF - Revista Mexicana de Fisica

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