TY - JOUR
T1 - Observation of thermal desorption and MBE growth rate using laser light scattering
AU - Huerta-Ruelas, J.
AU - López-López, M.
AU - Zelaya-Angel, O.
N1 - Funding Information:
The authors acknowledge the technical support provided by A. Guillen, Z. Rivera, R. Fragoso, and S. Quintana. Also, it is acknowledged the help given by Prof. J. Salas to take the images of RHEED patterns. J. Huerta acknowledges the financial support granted by CONACyT. This work was partially supported by CONACyT-México.
PY - 2000/9/3
Y1 - 2000/9/3
N2 - We applied Laser Light Scattering (LLS) to study oxide surface desorption on InSb substrates, and the subsequent growth of CdTe layers by molecular beam epitaxy. LLS measurements allowed us to determine the critical temperature before surface degradation of InSb, which is not clearly noticed by Reflection High Energy Electron Diffraction (RHEED). Surface defects appeared on substrates where this temperature was exceeded, as observed by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). During the MBE growth of CdTe on InSb, two features were noticed in LLS measurements. First, a decrease in intensity was observed that can be associated to a change in surface roughness at the initial stages of growth. The second feature is an oscillatory behavior, which can be related to interference. A geometrical model of interference in thin films was used to calculate the layer thickness in real time.
AB - We applied Laser Light Scattering (LLS) to study oxide surface desorption on InSb substrates, and the subsequent growth of CdTe layers by molecular beam epitaxy. LLS measurements allowed us to determine the critical temperature before surface degradation of InSb, which is not clearly noticed by Reflection High Energy Electron Diffraction (RHEED). Surface defects appeared on substrates where this temperature was exceeded, as observed by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). During the MBE growth of CdTe on InSb, two features were noticed in LLS measurements. First, a decrease in intensity was observed that can be associated to a change in surface roughness at the initial stages of growth. The second feature is an oscillatory behavior, which can be related to interference. A geometrical model of interference in thin films was used to calculate the layer thickness in real time.
UR - http://www.scopus.com/inward/record.url?scp=0343408408&partnerID=8YFLogxK
U2 - 10.1016/S0040-6090(00)01083-X
DO - 10.1016/S0040-6090(00)01083-X
M3 - Artículo
AN - SCOPUS:0343408408
SN - 0040-6090
VL - 373
SP - 239
EP - 242
JO - Thin Solid Films
JF - Thin Solid Films
IS - 1-2
ER -