Influence of the N₂ partial pressure on the mechanical properties and tribological behavior of zirconium nitride deposited by reactive magnetron sputtering

Ingeniería y ciencia de los materiales

• Reactive sputtering 100%
• Magnetron sputtering 84%
• Zirconium 79%
• Nitrides 76%
• Partial pressure 75%
• Coatings 47%
• Mechanical properties 41%
• Nanoindentation 25%
• Wear of materials 23%
• Substrates 22%
• Hardness 16%
• Abrasion 10%
• Austenitic stainless steel 10%
• Adhesives 9%
• Plastic deformation 9%
• Oxides 9%
• Scanning electron microscopy 8%

Física y astronomía

• zirconium nitrides 98%
• partial pressure 60%
• magnetron sputtering 53%
• coatings 42%
• mechanical properties 42%
• nanoindentation 25%
• balls 22%
• modulus of elasticity 20%
• hardness 19%
• tribometers 17%
• abrasives 15%
• integrity 13%
• adhesives 12%
• sliding 11%
• coating 11%
• stainless steels 11%
• plastic deformation 11%
• scanning electron microscopy 8%
• oxides 7%

Química

• Magnetron Sputtering 73%
• Nitride 61%
• Partial Pressure 60%
• Coating Agent 37%
• Wear 35%
• Young's Modulus 26%
• Plastic Deformation 15%
• Abrasive 15%
• Scanning Electron Microscopy 7%
• Oxide 6%
• Surface 4%